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DUV Lithography Service

We offer an affordable and efficient deep-UV projection lithography service for 8” (200 mm) substrates.

Cost:

Item

Cost industry (£)

Cost academic (£)

Setup & 1st wafer

£2,500

£1,000

Each additional wafer

£175

£75

Example cost per batch:

Number of Wafers

Cost industry (£)

Cost academic (£)

1

£2,500

£1,000

10

£4,075

£1,675

25

£6,700

£2,800

Reticle cost:

Mask Grade

Pellicle*

Address Size Reticle (µm)

Min. Feature Size Reticle (µm)

Min. Feature Size Wafer (µm)†

CD Tolerance Reticle (µm)

Defect Density (µm)

Cost (£)

Standard

No

0.0625

2

0.5

0.15

0>1.0

£790

High

No

0.005

0.8

0.2

0.08

0>0.5

£1,350

Ultra-High

No

0.005

0.5

0.125

0.03

0>0.25

£2595

Standard

Yes

0.0625

2

0.5

0.15

0>1.0

£955

High

Yes

0.005

0.8

0.2

0.08

0>0.5

£1,580

Ultra-High

Yes

0.005

0.5

0.125

0.03

0>0.25

£2,935

More details to follow

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